Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅱ. Application of Fluorinated Polyimides in Microelectronics Industry

Jin-gang LIU; Min-hui HE; Li-fang WANG; Hai-xia YANG; Yan-feng LI; Lin FAN; Shi-yong YANG

doi:10.14028/j.cnki.1003-3726.2003.04.002

您当前的位置：

首页 >

文章列表页 >

Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅱ. Application of Fluorinated Polyimides in Microelectronics Industry

更新时间：2022-09-18

- Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅱ. Application of Fluorinated Polyimides in Microelectronics Industry
- Polymer Bulletin Vol. 16, Issue 4, Pages: 10-24(2003)
- 作者机构：
  
  1.中国科学院化学研究所，工程塑料国家重点实验室，分子科学中心，北京　100080
  2.兰州大学，兰州大学化学化工学院，兰州　730000
- 作者简介：
- 基金信息：
- DOI：10.14028/j.cnki.1003-3726.2003.04.002
  CLC：
- Published：2003-08，
扫描看全文
Jin-gang LIU, Min-hui HE, Li-fang WANG, Hai-xia YANG, Yan-feng LI, Lin FAN, Shi-yong YANG. Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅱ. Application of Fluorinated Polyimides in Microelectronics Industry. [J]. Polymer Bulletin 16(4):10-24(2003)
DOI：

Jin-gang LIU, Min-hui HE, Li-fang WANG, Hai-xia YANG, Yan-feng LI, Lin FAN, Shi-yong YANG. Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅱ. Application of Fluorinated Polyimides in Microelectronics Industry. [J]. Polymer Bulletin 16(4):10-24(2003) DOI： 10.14028/j.cnki.1003-3726.2003.04.002.

摘要

综述了近年来国内外在含氟聚酰亚胺（PI）研究及应用领域中的最新进展情况。主要从现代微电子工业对相关材料的性能要求、标准型聚酰亚胺材料所面临的挑战以及新型含氟聚酰亚胺在微电子工业中的应用等几个方面进行了详细的综述。重点阐述了中国科学院化学研究所305组近几年在这方面的研究进展情况。并指出为了推动我国微电子工业的发展

研制开发低成本、高技术含量的含氟聚酰亚胺材料具有十分重要的现实意义。

Abstract

In the article

the latest research and application development of fluorinated polyimides have been summarized. Fluorinated polyimides have been widely used in many high technical fields for the excellent thermal properties

electrical properties and mechanical properties. In recent years

with the development of microelectronics industry

fluorinated polyimides are gaining increasing attention in passivation and packaging applications. The applications of fluorinated polyimides in electro-optic ansd liquid crystal display (LCD) and low dielectric constant materials fields

especially the corresponding works of institute of chemistry were discussed in detail. In order to meet the stringent needs of microelectronics industry on materials

the functional fluorinated polyimides must be researched and developed.

关键词

含氟聚酰亚胺微电子低介电常数材料取向膜

Keywords

Fluorinated polyimidesMicroelectronicLCDLow dielectric constant

references

更多指标>

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Fluorinated Polyimides and the Applications in Microelectronics Industry Ⅰ.Synthesis of Fluorinated Monomers and Polyimides

Related Author

No data

Related Institution

School of Chemistry and Chemical Engineering,Lanzhou University

⁰