Recent Progress on Acidolysis Polymers

Shangxian Yu; Jiangnan Gu

doi:10.14028/j.cnki.1003-3726.1990.04.003

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Recent Progress on Acidolysis Polymers

更新时间：2022-09-18

- Recent Progress on Acidolysis Polymers
- Polymer Bulletin Vol. 3, Issue 4, Pages: 205-212(1990)
- 作者机构：
  
  北京师范大学应用化学研究所，北京，100875
- 作者简介：
- 基金信息：
- DOI：10.14028/j.cnki.1003-3726.1990.04.003
  CLC：
- Published：1990，
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Shangxian Yu, Jiangnan Gu. Recent Progress on Acidolysis Polymers. [J]. Polymer Bulletin 3(4):205-212(1990)
DOI：

Shangxian Yu, Jiangnan Gu. Recent Progress on Acidolysis Polymers. [J]. Polymer Bulletin 3(4):205-212(1990) DOI： 10.14028/j.cnki.1003-3726.1990.04.003.

摘要

提要本文综述了80年代酸分解高分子的进展，并对其作了详细分类。以其不同的结构特征阐明了它们的酸解机理。本文还对酸解高分子用于成像材料、特别是化学增幅抗蚀剂的前景作了展望。

Abstract

This paper presents a review on a lot of asidolysis polymers in the 1980' s. A detailed classification of the polymers are given. The characteristics of their structures are illustrated from the view point of chemistry and on these grounds their acidolysis mechanism are explained. The prospects of using them for the imaging materials

especially chemical amplification resists

are also forecasted.

关键词

酸分解高分子化学增幅抗蚀剂酸解机理光致抗蚀剂

Keywords

Acidolysis polymerChemical amplification resistAcidolysis mechaniamPhotoresist

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