Using plasma method to treat the polydimethylsiloxane (PDMS) substrates and glass's surface

exploring the optimal process parameter combination of polydimethylsiloxane (PDMS) matrix and glass bonding

the relationship between bonding effect and bonding time

and the relationship between PDMS substrate placement time and bonding area. The test results showed that the influencing factors were oxygen flow > cleaning time > radio frequency from primary to secondary. The optimal parameter combination of test scheme was 250W

2L/min

1min; the most suitable bonding time was 12h

during this time the longer the bonding time

the better the bonding effect; the longer the PDMS substrate was placed

the worse the bonding effect was. To ensure the bonding quality

bonding test was usually performed within 10 minutes after the surface treatment.